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MKS Mass Flow Meter

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1. What are the brands of imported mass flow meters or mass flow controllers? Overall, gas mass flow controllers such as Seven Star and INHA are still reliable. The main imported brands are European and American brands such as BROOKS and MKS.

2. In the vacuum coating industry How to control the flow rate of argon gas specifically?

My personal opinion is as follows

1. Thermal gas mass flow controller (MFC), which has a temperature sensor and a speed sensor inside. The flow rate is controlled by a high-performance proportional solenoid valve, and the valve core opening or frequency is adjusted by 0-5V voltage to accurately control the flow rate of the medium.

2. Hot gas mass flow controller.

, AE flowmeter, controllable range 2SCCM-200SLM, flow size, customers can choose for you as long as they have flow requirements in this range. Some customers in the vacuum coating industry have learned tha
MKS Mass Flow Meter
t they generally use MFCs with small flow rates, concentrated at 100SCCM/MIN, 500SCCM/MIN, 1000SCCM/MIN. 3. Inlet pressure: maximum 1Mpa Normal working pressure: 0.5Mpa MFC is not affected by gas temperature and pressure, and its accuracy and repeatability accuracy are fast, with a response time of less than 1 second to reach the set value. 4. MFCs are generally calibrated with nitrogen gas, and if customers need to measure Ar Flow rate, when leaving the factory, the manufacturer calibrates it according to argon gas, and can also provide a ratio coefficient for converting between argon gas and nitrogen gas. You only need to multiply this coefficient, and the inlet pressure is the same. You can consult some relevant technicians in the vacuum coating industry. For example, Zhaoqing Zhenhua Vacuum Machinery Co., Ltd. The vacuum film industry in Zhaoqing City is relatively prosperous. This is the only way it can help you.

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